검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Real-time monitoring of charge accumulation during pulse-time-modulated plasma Ohtake H, Jinnai B, Suzuki Y, Soda S, Shimmura T, Sarnukawa S Journal of Vacuum Science & Technology A, 24(6), 2172, 2006 |
| No. | Article |
|---|---|
| 1 |
Real-time monitoring of charge accumulation during pulse-time-modulated plasma Ohtake H, Jinnai B, Suzuki Y, Soda S, Shimmura T, Sarnukawa S Journal of Vacuum Science & Technology A, 24(6), 2172, 2006 |