검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Multicusp Sources for Ion-Beam Lithography Applications Leung KN, Herz P, Kunkel WB, Lee Y, Perkins L, Pickard D, Sarstedt M, Weber M, Williams MD Journal of Vacuum Science & Technology B, 13(6), 2600, 1995 |
| No. | Article |
|---|---|
| 1 |
Multicusp Sources for Ion-Beam Lithography Applications Leung KN, Herz P, Kunkel WB, Lee Y, Perkins L, Pickard D, Sarstedt M, Weber M, Williams MD Journal of Vacuum Science & Technology B, 13(6), 2600, 1995 |