검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Influence of Oxygen on the Composition and Some Properties of the Films Obtained by RF-Sputtering from a Si3N4 Target Volkov VT, Satunkina LF Thin Solid Films, 247(2), 145, 1994 |
| No. | Article |
|---|---|
| 1 |
Influence of Oxygen on the Composition and Some Properties of the Films Obtained by RF-Sputtering from a Si3N4 Target Volkov VT, Satunkina LF Thin Solid Films, 247(2), 145, 1994 |