검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
A cluster size nanofilter with variable openings between 2 and 50 nm Schollkopf W, Toennies JP, Savas TA, Smith HI Journal of Chemical Physics, 109(21), 9252, 1998 |
| 2 |
Zone-plate-array lithography in the deep ultraviolet Djomehri IJ, Savas TA, Smith HI Journal of Vacuum Science & Technology B, 16(6), 3426, 1998 |
| 3 |
Large-Area Achromatic Interferometric Lithography for 100 nm Period Gratings and Grids Savas TA, Schattenburg ML, Carter JM, Smith HI Journal of Vacuum Science & Technology B, 14(6), 4167, 1996 |
| 4 |
Achromatic Interferometric Lithography for 100-nm-Period Gratings and Grids Savas TA, Shah SN, Schattenburg ML, Carter JM, Smith HI Journal of Vacuum Science & Technology B, 13(6), 2732, 1995 |