검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Large area VHF plasma sources Takagi T, Ueda M, ITo N, Watabe Y, Sato H, Sawaya K Thin Solid Films, 502(1-2), 50, 2006 |
| No. | Article |
|---|---|
| 1 |
Large area VHF plasma sources Takagi T, Ueda M, ITo N, Watabe Y, Sato H, Sawaya K Thin Solid Films, 502(1-2), 50, 2006 |