검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Neutral gas temperature measurements within transformer coupled toroidal argon plasmas Bai B, Sawin H Journal of Vacuum Science & Technology A, 22(5), 2014, 2004 |
| 2 |
Evaluation of octafluorocyclobutane as a chamber clean gas in a plasma-enhanced silicon dioxide chemical vapor deposition reactor Allgood C, Mocella M, Chae HY, Sawin H Journal of the Electrochemical Society, 150(2), G122, 2003 |
| 3 |
Thermal decomposition of low dielectric constant pulsed plasma fluorocarbon films - I. Effect of precursors and substrate temperature Cruden B, Chu K, Gleason K, Sawin H Journal of the Electrochemical Society, 146(12), 4590, 1999 |
| 4 |
Thermal decomposition of low dielectric constant pulsed plasma fluorocarbon films - II. Effect of postdeposition annealing and ambients Cruden B, Chu K, Gleason K, Sawin H Journal of the Electrochemical Society, 146(12), 4597, 1999 |