검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Influence of sputtering power on crystal quality and electrical properties of Sc-doped AlN film prepared by DC magnetron sputtering Yang JC, Meng XQ, Yang CT, Zhang Y Applied Surface Science, 287, 355, 2013 |
| No. | Article |
|---|---|
| 1 |
Influence of sputtering power on crystal quality and electrical properties of Sc-doped AlN film prepared by DC magnetron sputtering Yang JC, Meng XQ, Yang CT, Zhang Y Applied Surface Science, 287, 355, 2013 |