검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Redistribution and activation of implanted S, Se, Te, Be, Mg, and C in GaN Wilson RG, Zavada JM, Cao XA, Singh RK, Pearton SJ, Guo HJ, Pennycock SJ, Fu M, Sekhar JA, Scarvepalli V, Shu RJ, Han J, Rieger DJ, Zolper JC, Abernathy CR Journal of Vacuum Science & Technology A, 17(4), 1226, 1999 |