검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Employing thin-film delamination for the formation of shadow masks for nanostructure fabrication Elbahri M, Rudra SK, Wille S, Jebril S, Scharnberg M, Paretkar D, Kunz R, Rui H, Biswas A, Adelung R Advanced Materials, 18(8), 1059, 2006 |
| 2 |
Effects of surface chemistry on ALD Ta3N5 barrier formation on low-k dielectrics Liu J, Bao J, Scharnberg M, Kim WC, Ho PS, Laxman R Journal of Vacuum Science & Technology A, 23(4), 1107, 2005 |
| 3 |
Initial interface formation of Ta-based barriers on SiLK (TM) low dielectric constant films Liu J, Scharnberg M, Bao J, Im J, Ho PS Journal of Vacuum Science & Technology B, 23(4), 1422, 2005 |