검색결과 : 20건
| No. | Article |
|---|---|
| 1 |
Towards fast nanopattern fabrication by local laser annealing of block copolymer (BCP) films Zimmer K, Zajadacz J, Frost F, Mayer A, Steinberg C, Chang HF, Cheng JY, Scheer HC Applied Surface Science, 470, 639, 2019 |
| 2 |
Sputtering with an etch-free lift-off in thermal nanoimprint lithography Mayer A, Bogdanski N, Mollenbeck S, Dhima K, Papenheim M, Scheer HC Journal of Vacuum Science & Technology B, 28(6), C6M136, 2010 |
| 3 |
Aspects of hybrid pattern definition while combining thermal nanoimprint with optical lithography Scheer HC, Mollenbeck S, Mayer A, Dhima K Journal of Vacuum Science & Technology B, 28(6), C6M1, 2010 |
| 4 |
Thermal imprint into thin polymer layers below the critical molecular weight Bogdanski N, Wissen M, Mollenbeck S, Scheer HC Journal of Vacuum Science & Technology B, 27(3), 1191, 2009 |
| 5 |
Recovery prevention via pressure control in thermal nanoimprint lithography Scheer HC, Bogdanski N, Mollenbeck S, Mayer A Journal of Vacuum Science & Technology B, 27(6), 2882, 2009 |
| 6 |
Preparation of diamond-shaped channels in SU-8 for optical control of the filling state Mollenbeck S, Bogdanski N, Mayer A, Scheer HC, Zajadacz J, Zimmer K Journal of Vacuum Science & Technology B, 27(6), 3078, 2009 |
| 7 |
Quality assessment of antisticking layers for thermal nanoimprint Scheer HC, Hafner W, Fidler A, Mollenbeck S, Bogdanski N Journal of Vacuum Science & Technology B, 26(6), 2380, 2008 |
| 8 |
Contact angles in a thermal imprint process Bogdanski N, Mollenbeck S, Scheer HC Journal of Vacuum Science & Technology B, 26(6), 2416, 2008 |
| 9 |
Multiple replication of three dimensional structures with undercuts Mollenbeck S, Bogdanski N, Wissen M, Scheer HC, Zajadacz J, Zimmer K Journal of Vacuum Science & Technology B, 25(1), 247, 2007 |
| 10 |
Impact of glass temperature for thermal nanoimprint Scheer HC, Bogdanski N, Wissen M, Mollenbeck S Journal of Vacuum Science & Technology B, 25(6), 2392, 2007 |