검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Enhancement of semiconductor wafer cleaning by chelating agent addition Gale GW, Rath DL, Cooper EI, Estes S, Okorn-Schmidt HF, Brigante J, Jagannathan R, Settembre G, Adams E Journal of the Electrochemical Society, 148(9), G513, 2001 |
| 2 |
Impact of the Electrochemical Properties of Silicon-Wafer Surfaces on Copper Outplating from HF Solutions Teerlinck I, Mertens PW, Schmidt HF, Meuris M, Heyns MM Journal of the Electrochemical Society, 143(10), 3323, 1996 |
| 3 |
Sensitive Light-Scattering as a Semiquantitative Method for Studying Photoresist Stripping Rotondaro AL, Meuris M, Schmidt HF, Heyns MM, Claeys C, Hellemans L, Snauwaert J Journal of the Electrochemical Society, 142(1), 211, 1995 |