화학공학소재연구정보센터
검색결과 : 12건
No. Article
1 Low-power DRAM-compatible Replacement Gate High-k/Metal Gate Stacks
Ritzenthaler R, Schram T, Bury E, Spessot A, Caillat C, Srividya V, Sebaai F, Mitard J, Ragnarsson LA, Groeseneken G, Horiguchi N, Fazan P, Thean A
Solid-State Electronics, 84, 22, 2013
2 Development of ALD HfZrOx with TDEAH/TDEAZ and H2O
Shi X, Tielens H, Takeoka S, Nakabayashi T, Nyns L, Adelmann C, Delabie A, Schram T, Ragnarsson L, Schaekers M, Date L, Schreutelkamp R, Van Elshocht S
Journal of the Electrochemical Society, 158(1), H69, 2011
3 Numerical simulation of air flow through turbocharger compressors with dual volute design
Jiao K, Sun H, Li XG, Wu H, Krivitzky E, Schram T, Larosiliere LM
Applied Energy, 86(11), 2494, 2009
4 Alternative high-k dielectrics for semiconductor applications
Van Elshocht S, Adelmann C, Clima S, Pourtois G, Conard T, Delabie A, Franquet A, Lehnen P, Meersschaut J, Menou N, Popovici M, Richard O, Schram T, Wang XP, Hardy A, Dewulf D, Van Bael MK, Lehnen P, Blomberg T, Pierreux D, Swerts J, Maes JW, Wouters DJ, De Gendt S, Kittl JA
Journal of Vacuum Science & Technology B, 27(1), 209, 2009
5 Investigation on molybdenum and its conductive oxides as p-type metal gate candidates
Li Z, Schram T, Witters T, Cho HJ, O'Sullivan B, Yamada N, Takaaki T, Hooker J, De Gendt S, De Meyer K
Journal of the Electrochemical Society, 155(7), H481, 2008
6 Evaluation of atomic layer deposited NbN and NbSiN as metal gate materials
Van Hoornick N, De Witte H, Witters T, Zhao C, Conard T, Huotari H, Swerts J, Schram T, Maes JW, De Gendt S, Heyns M
Journal of the Electrochemical Society, 153(5), G437, 2006
7 Study of the formation of chromate conversion coatings on Alclad 2024 aluminum alloy using spectroscopic ellipsometry
Campestrini P, Bohm S, Schram T, Terryn H, de Wit JHW
Thin Solid Films, 410(1-2), 76, 2002
8 The use of infrared spectroscopic ellipsometry for the thickness determination and molecular characterization of thin films on aluminum
Schram T, Terryn H
Journal of the Electrochemical Society, 148(2), F12, 2001
9 Determination of the thickness of thin silane films on aluminium surfaces by means of spectroscopic ellipsometry
Franquet A, De Laet J, Schram T, Terryn H, Subramanian V, van Ooij WJ, Vereecken J
Thin Solid Films, 384(1), 37, 2001
10 Nondestructive optical characterization of chemical conversion coatings on aluminum
Schram T, De Laet J, Terryn H
Journal of the Electrochemical Society, 145(8), 2733, 1998