화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Nondestructive Thickness Determination of Thin Cobalt and Cobalt Disilicide Layers on Silicon Substrates
Roca E, Vanhellemont J, Schreutelkamp RJ, Vermeiren J
Thin Solid Films, 240(1-2), 110, 1994
2 Nondestructive Characterization of the Uniformity of Thin Cobalt Disilicide Films by Raman Microprobe Measurements
Perezrodriguez A, Roca E, Jawhari T, Morante JR, Schreutelkamp RJ
Thin Solid Films, 251(1), 45, 1994