검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Magnetron sputter deposited tantalum and tantalum nitride thin films: An analysis of phase, hardness and composition Bernoulli D, Muller U, Schwarzenberger M, Hauert R, Spolenak R Thin Solid Films, 548, 157, 2013 |
| No. | Article |
|---|---|
| 1 |
Magnetron sputter deposited tantalum and tantalum nitride thin films: An analysis of phase, hardness and composition Bernoulli D, Muller U, Schwarzenberger M, Hauert R, Spolenak R Thin Solid Films, 548, 157, 2013 |