검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
In-Situ Tensile-Strength Measurement and Weibull Analysis of Thick-Film and Thin-Film Micromachined Polysilicon Structures Greek S, Ericson F, Johansson S, Schweitz JA Thin Solid Films, 292(1-2), 247, 1997 |
| 2 |
Deposition of Thick Doped Polysilicon Films with Low-Stress in an Epitaxial Reactor for Surface Micromachining Applications Kirsten M, Wenk B, Ericson F, Schweitz JA, Riethmuller W, Lange P Thin Solid Films, 259(2), 181, 1995 |
| 3 |
GaAs Low-Temperature Fusion Bonding Hjort K, Ericson F, Schweitz JA, Hallin C, Janzen E Journal of the Electrochemical Society, 141(11), 3242, 1994 |
| 4 |
Hardness, Internal-Stress and Fracture-Toughness of Epitaxial AlxGa1-xAs Films Hjort K, Ericson F, Schweitz JA, Hallin C, Janzen E Thin Solid Films, 250(1-2), 157, 1994 |