검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Modeling analysis of SiCCVD in a planetary reactor Vorob'ev AN, Semennikov AK, Zhmakin AI, Makarov YN, Dauelsberg M, Wischmeyer F, Heuken M, Jurgensen H Materials Science Forum, 353-356, 103, 2001 |
| No. | Article |
|---|---|
| 1 |
Modeling analysis of SiCCVD in a planetary reactor Vorob'ev AN, Semennikov AK, Zhmakin AI, Makarov YN, Dauelsberg M, Wischmeyer F, Heuken M, Jurgensen H Materials Science Forum, 353-356, 103, 2001 |