| 1 |
Diffusion and reaction kinetics governing surface blistering in radio frequency sputtered hydrogenated a-SixGe1-x (0 <= x <= 1) thin films
Serenyi M, Csik A, Hamori A, Kalas B, Lukacs I, Zolnai ZS, Frigeri C
Thin Solid Films, 679, 58, 2019 |
| 2 |
CoPt/TiN films nanopatterned by RF plasma etching towards dot-patterned magnetic media
Szivos J, Pothorszky S, Soltys J, Serenyi M, An HY, Gao TH, Deak A, Shi J, Safran G
Applied Surface Science, 435, 31, 2018 |
| 3 |
Spectroellipsometric detection of silicon substrate damage caused by radiofrequency sputtering of niobium oxide
Lohner T, Serenyi M, Szilagyi E, Zolnai Z, Czigany Z, Khanh NQ, Petrik P, Fried M
Applied Surface Science, 421, 636, 2017 |
| 4 |
Effect of heat treatments on the properties of hydrogenated amorphous silicon for PV and PVT applications
Frigeri C, Serenyi M, Szekrenyes Z, Kamaras K, Csik A, Khanh NQ
Solar Energy, 119, 225, 2015 |
| 5 |
Hydrogen behaviour in amorphous Si/Ge nano-structures after annealing
Frigeri C, Serenyi M, Khanh NQ, Csik A, Nasi L, Erdelyi Z, Beke DL, Boyen HG
Applied Surface Science, 267, 30, 2013 |
| 6 |
Evolution of the structure and hydrogen bonding configuration in annealed hydrogenated a-Si/a-Ge multilayers and layers
Frigeri C, Serenyi M, Csik A, Szekrenyes Z, Kamaras K, Nasi L, Khanh NQ
Applied Surface Science, 269, 12, 2013 |
| 7 |
Characterization of sputtered and annealed niobium oxide films using spectroscopic ellipsometry, Rutherford backscattering spectrometry and X-ray diffraction
Serenyi M, Lohner T, Petrik P, Zolnai Z, Horvath ZE, Khanh NQ
Thin Solid Films, 516(22), 8096, 2008 |
| 8 |
Comparative analysis of amorphous silicon and silicon nitride multilayer by spectroscopic ellipsometry and transmission electron microscopy
Serenyi M, Lohner T, Petrik P, Frigeri C
Thin Solid Films, 515(7-8), 3559, 2007 |
| 9 |
Modification of Al/Si interface and Schottky barrier height with chemical treatment
Horvath ZJ, Adam M, Szabo I, Serenyi M, Van Tuyen V
Applied Surface Science, 190(1-4), 441, 2002 |
