검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Monte-Carlo Numerical-Analysis of Target Erosion and Film Growth in a 3-Dimensional Sputtering Chamber Serikov VV, Nanbu K Journal of Vacuum Science & Technology A, 14(6), 3108, 1996 |
| No. | Article |
|---|---|
| 1 |
Monte-Carlo Numerical-Analysis of Target Erosion and Film Growth in a 3-Dimensional Sputtering Chamber Serikov VV, Nanbu K Journal of Vacuum Science & Technology A, 14(6), 3108, 1996 |