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그림자효과를 이용하여 증착한 타이타늄 박막의 미세구조 및 형상 한창석, 진성윤, 권혁구 Korean Journal of Materials Research, 29(11), 709, 2019 |
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Substrate dependent hierarchical structures of RF sputtered ZnS films Chalana SR, Pillai VPM Applied Surface Science, 440, 1181, 2018 |
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Reduced atomic shadowing in HiPIMS: Role of the thermalized metal ions Oliveira JC, Ferreira F, Anders A, Cavaleiro A Applied Surface Science, 433, 934, 2018 |
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Modification of SiO2 thickness distribution through evaporation Zhang XM, Gu XF, Xiao SQ Thin Solid Films, 642, 31, 2017 |
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In situ detailed fluence rate distributions in a UV reactor with multiple low-pressure lamps: Comparison of experimental and model results Li MK, Qiang ZM, Bolton JR Chemical Engineering Journal, 214, 55, 2013 |
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Study on remote source solar lighting system application in high-rise residential buildings in Hong Kong Wong I, Yang HX Energy and Buildings, 60, 225, 2013 |
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Creation of biaxial body center cubic tungsten nanorods under dynamic shadowing effect Chen L, Lu TM, Wang GC Thin Solid Films, 539, 65, 2013 |
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Carbon contamination of EUV mask and its effect on CD performance Lee S, Doh JG, Lee JU, Lee I, Jeong CY, Lee DG, Rah SY, Ahn J Current Applied Physics, 11(4), S107, 2011 |
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Effect of deposition angle on the structure and properties of pulsed-DC magnetron sputtered TiAlN thin films Shetty AR, Karimi A, Cantoni M Thin Solid Films, 519(13), 4262, 2011 |
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Formation of porous niobium films by oblique angle deposition: Influence of substrate morphology Tanvir MT, Aoki Y, Habazaki H Thin Solid Films, 517(24), 6711, 2009 |