검색결과 : 10건
| No. | Article |
|---|---|
| 1 |
Synthesis and properties of thallium nitride films Shaginyan LR Materials Chemistry and Physics, 227, 157, 2019 |
| 2 |
Evolution of film temperature during magnetron sputtering Shaginyan LR, Han JG, Shaginyan VR, Musil J Journal of Vacuum Science & Technology A, 24(4), 1083, 2006 |
| 3 |
Effect of the target power density on the synthesis and physical properties of sputtered nc-C films Myung HS, Park YS, Hong B, Han JG, Kim YH, Lee JY, Shaginyan LR Thin Solid Films, 494(1-2), 123, 2006 |
| 4 |
Synthesis and mechanical properties of hydrogenated carbon and carbon nitride films prepared by magnetron sputtering Myung HS, Park YS, Hong B, Han JG, Shaginyan LR Thin Solid Films, 506, 87, 2006 |
| 5 |
Role of the composition and type of film-forming species in film structure formation Shaginyan LR, Han JG Thin Solid Films, 458(1-2), 186, 2004 |
| 6 |
Deposition of Ti thin film using the magnetron sputtering method Jung MJ, Nam KH, Shaginyan LR, Han JG Thin Solid Films, 435(1-2), 145, 2003 |
| 7 |
Composition, structure, microhardness and residual stress of W-Ti-N films deposited by reactive magnetron sputtering Shaginyan LR, Misina M, Zemek J, Musil J, Regent F, Britun VF Thin Solid Films, 408(1-2), 136, 2002 |
| 8 |
Polycrystalline Si thin film growth on glass using pulsed d.c. magnetron sputtering Jung MJ, Jung YM, Shaginyan LR, Han JG Thin Solid Films, 420-421, 429, 2002 |
| 9 |
Mechanism of the film composition formation during magnetron sputtering of WTi Shaginyan LR, Misina M, Kadlec S, Jastrabik L, Mackova A, Perina V Journal of Vacuum Science & Technology A, 19(5), 2554, 2001 |
| 10 |
Influence of different physical factors on microstructure and properties of magnetron sputtered amorphous carbon films Shaginyan LR, Onoprienko AA, Britun VF, Smirnov VP Thin Solid Films, 397(1-2), 288, 2001 |