검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Stability of Schottky contacts with Ta-Si-N amorphous diffusion barriers and Au overlayers on 6H-SiC Shalish I, Shapira Y Journal of Vacuum Science & Technology B, 18(5), 2477, 2000 |
| 2 |
Thermal stability of a Ti-Si-N diffusion barrier in contact with a Ti adhesion layer for Au metallization Shalish I, Shapira Y Journal of Vacuum Science & Technology B, 17(1), 166, 1999 |
| 3 |
Gold Metallization for Aluminum Nitride Shalish I, Gasser SM, Kolawa E, Nicolet MA, Ruiz RP Thin Solid Films, 289(1-2), 166, 1996 |