검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Controllable change of porosity of 3-methylsilane low-k dielectric film Shamiryan DG, Baklanov MR, Vanhaelemeersch S, Maex K Electrochemical and Solid State Letters, 4(1), F3, 2001 |
| 2 |
Characterization of Cu surface cleaning by hydrogen plasma Baklanov MR, Shamiryan DG, Tokei Z, Beyer GP, Conard T, Vanhaelemeersch S, Maex K Journal of Vacuum Science & Technology B, 19(4), 1201, 2001 |