검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
An oxynitride gate dielectric for sub-30 angstrom complementary metal oxide semiconductor devices using precombustion of nitrous oxide Shank SM, Clark WF, Hodge WJ Journal of the Electrochemical Society, 149(9), G532, 2002 |
| 2 |
Fabrication of High-Aspect-Ratio Structures for Microchannel Plates Shank SM, Soave RJ, Then AM, Tasker GW Journal of Vacuum Science & Technology B, 13(6), 2736, 1995 |
| 3 |
Multiple-Level Phase Gratings Fabricated Using Focused Ion-Beam Milling and Electron-Beam Lithography Shank SM, Chen FT, Skvarla M, Craighead HG, Cook P, Bussjager R, Haas F, Honey DA Journal of Vacuum Science & Technology B, 12(6), 3643, 1994 |