검색결과 : 5건
| No. | Article |
|---|---|
| 1 |
Growth and characterization of rapid thermal chlorinated oxides grown using in situ generated HCl Sharangpani R, Tay SP Journal of the Electrochemical Society, 148(1), F5, 2001 |
| 2 |
In situ rapid thermal oxidation and reduction of copper thin films and their applications in ultralarge scale integration Hu YZ, Sharangpani R, Tay SP Journal of the Electrochemical Society, 148(12), G669, 2001 |
| 3 |
Kinetic investigation of copper film oxidation by spectroscopic ellipsometry and reflectometry Hu YZ, Sharangpani R, Tay SP Journal of Vacuum Science & Technology A, 18(5), 2527, 2000 |
| 4 |
Importance of High-Energy Photons in the Curing of Spin-on Low Dielectric-Constant Interconnect Materials Sharangpani R, Cherukuri KC, Singh R Journal of the Electrochemical Society, 144(2), 669, 1997 |
| 5 |
A Comparative-Study of Spin-on and Chemical-Vapor-Deposited Teflon Amorphous Fluoropolymer Thin-Films Sharangpani R, Singh R Journal of the Electrochemical Society, 144(8), 2924, 1997 |