검색결과 : 3건
No. | Article |
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1 |
Electric Field Accelerating Interface Diffusion in Cu/Ru/TaN/Si Stacks during Annealing Wang L, Cao ZH, Syed JA, Hu K, She QW, Meng XK Electrochemical and Solid State Letters, 15(6), H188, 2012 |
2 |
Improved diffusion barrier performance of Ru/TaN bilayer by N effusion in TaN underlayer Wang L, Cao ZH, Hu K, She QW, Meng XK Materials Chemistry and Physics, 135(2-3), 806, 2012 |
3 |
Effects of electric field annealing on the interface diffusion of Cu/Ta/Si stacks Wang L, Cao ZH, Hu K, She QW, Meng XK Applied Surface Science, 257(24), 10845, 2011 |