화학공학소재연구정보센터
검색결과 : 7건
No. Article
1 Short-channel poly-Si thin-film transistors with ultrathin channel and self-aligned tungsten-clad source/drain
Zan HW, Chang TC, Shih PS, Peng DZ, Kuo PY, Huang TY, Chang CY, Liu PT
Electrochemical and Solid State Letters, 7(2), G31, 2004
2 Characterization and formation of nanocrystalline diamonds in a-C/N films by filtered cathodic vacuum arc plasma
Hsieh WJ, Shih PS, Lin JH, Lin CC, Chen US, Huang SC, Chang YS, Shih HC
Thin Solid Films, 469-470, 120, 2004
3 Exploring metal vapor vacuum arc implanted copper to catalyze electroless-plated copper film on a TaN/FSG/Si assembly
Chen US, Lin JH, Hsieh WJ, Shih PS, Weng KW, Wang DY, Chang YS, Shih HC
Journal of Vacuum Science & Technology B, 21(3), 1129, 2003
4 Improvements of amorphous-silicon inverted-staggered thin-film transistors using high-temperature-deposited Al gate with chemical mechanical polishing
Shih PS, Chang TC, Liang CY, Huang TY, Chang CY
Electrochemical and Solid State Letters, 3(5), 235, 2000
5 Annealing effects on the interfacial reactions of Ni on Si0.76Ge0.24 and Si1-x-yGexCy
Luo JS, Lin WT, Chang CY, Shih PS, Pan FM
Journal of Vacuum Science & Technology A, 18(1), 143, 2000
6 The effects of microcrystalline silicon film structure on low-high-low band-gap thin film transistor
Chang CY, Lee YS, Huang TY, Shih PS, Lin CW
Materials Chemistry and Physics, 62(2), 153, 2000
7 Room temperature oxidation of Cu/Si0.76Ge0.24 annealed at 200 to 300 degrees C
Luo JS, Lin WT, Chang CY, Shih PS
Thin Solid Films, 346(1-2), 207, 1999