검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Measurements of shallow trench isolation by normal incidence optical critical dimension technique Hu JT, Korlahalli R, Shivaprasad D, Yang F, Zhang XD Journal of Vacuum Science & Technology B, 22(3), 1000, 2004 |
| 2 |
Measurement of semi-isolated polysilicon gate structure with the optical critical dimension technique Shivaprasad D, Hu JT, Tabet M, Hoobler R, Mui D, Liu W Journal of Vacuum Science & Technology B, 21(6), 2517, 2003 |