검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Effect of silicon nitride capping layer on via electromigration and failure criterion methodology in multilevel interconnection Huang JS, Deng XJ, Yih PH, Shofner TL, Obeng YS, Darling C Thin Solid Films, 397(1-2), 186, 2001 |
| 2 |
Nanoscale elemental imaging of semiconductor materials using focused ion beam secondary ion mass spectrometry Stevie FA, Downey SW, Brown SR, Shofner TL, Decker MA, Dingle T, Christman L Journal of Vacuum Science & Technology B, 17(6), 2476, 1999 |