검색결과 : 1건
No. | Article |
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1 |
Characteristics of selective epitaxial SiGe deposition processes for recessed source/drain applications Loo R, Verheyen P, Eneman G, Rooyackers R, Leys F, Shamiryan D, De Meyer K, Absil PP, Caymax M Thin Solid Films, 508(1-2), 266, 2006 |