검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Structure and morphology of 4H-SiC wafer surfaces after H-2-Etching Soubatch S, Saddow SE, Rao SP, Lee WY, Konuma M, Starke U Materials Science Forum, 483, 761, 2005 |
| 2 |
The reactive neutral beam etching of SiC and its application in p-n junction periphery protection. Sarov G, Cholakova T, Kakanakov R Materials Science Forum, 483, 769, 2005 |