검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Effect of high-frequency on etching of SiCOH films in CHF3 dual-frequency capacitively coupled plasmas Ye C, Xu YJ, Huang XJ, Ning ZY Thin Solid Films, 518(12), 3223, 2010 |
| 2 |
Plasma ash processing solutions for advanced interconnect technology Fuller NCM, Worsley MA, Tai L, Bent S, Labelle C, Arnold J, Dalton T Thin Solid Films, 516(11), 3558, 2008 |
| 3 |
Effect of Si-OH group on characteristics of SiCOH films prepared by decamethylcyclopentasiloxane electron cyclotron resonance plasma Ye C, Ning ZY, Wang TT, Yu XZ, Xin Y Thin Solid Films, 496(2), 221, 2006 |