검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
The effect of Ar flow rate in the growth of SiGe:H thin films by PECVD Tang ZG, Wang WB, Wang DS, Liu DQ, Liu QM, Yin M, He DY Applied Surface Science, 256(23), 7032, 2010 |
| No. | Article |
|---|---|
| 1 |
The effect of Ar flow rate in the growth of SiGe:H thin films by PECVD Tang ZG, Wang WB, Wang DS, Liu DQ, Liu QM, Yin M, He DY Applied Surface Science, 256(23), 7032, 2010 |