검색결과 : 1건
No. | Article |
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1 |
Structural characterization of ultrathin nanocrystalline silicon films formed by annealing amorphous silicon Lutzen J, Kamal AHM, Kozicki MN, Ferry DK, Sidorov MV, Smith DJ Journal of Vacuum Science & Technology B, 16(5), 2802, 1998 |