검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Thermal atomic layer deposition of AlOxNy thin films for surface passivation of nano-textured flexible silicon Parashar PK, Kinnunen SA, Sajavaara T, Toppari JJ, Komarala VK Solar Energy Materials and Solar Cells, 193, 231, 2019 |
| 2 |
Properties of SiAlO2N protective coatings on surface acoustic wave devices Sturtevant BT, da Cunha MP, Lad RJ Thin Solid Films, 534, 198, 2013 |