화학공학소재연구정보센터
검색결과 : 4건
No. Article
1 Effects of homogenous loading on silicon direct bonding
Huang LY, Ho KL, Hu CT
Applied Surface Science, 257(17), 7693, 2011
2 Influence of microwave annealing on direct bonded silicon wafers
Alford TL, Tang T, Thompson DC, Bhagat S, Mayer JW
Thin Solid Films, 516(8), 2158, 2008
3 Improved characterization methods for unipolar directly bonded semiconductor junctions
Stuchinsky VA, Kamaev GN, Khoroshilov KY
Solid-State Electronics, 49(1), 9, 2005
4 선형열처리법으로 직접 접합된 Si 기판 및 산화된 Si 기판의 접합 특성
이진우, 강춘식, 송오성, 류지호
Korean Journal of Materials Research, 10(10), 665, 2000