검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Reduced carbon contaminant, low-temperature silicon substrate preparation for "defect-free" homoepitaxy Taylor PJ, Jesser WA, Martinka M, Singley KM, Dinan JH, Lareau RT, Wood MC, Clark WW Journal of Vacuum Science & Technology A, 17(4), 1153, 1999 |