화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Excellent passivation and low reflectivity with atomic layer deposited bilayer coatings for n-type silicon solar cells
Lee BG, Li S, von Gastrow G, Yli-Koski M, Savin H, Malinen V, Skarp J, Choi S, Branz HM
Thin Solid Films, 550, 541, 2014
2 Dependence of Atomic Layer-Deposited Al2O3 Films Characteristics on Growth Temperature and Al Precursors of Al(CH3)(3) and AlCl3
Yun SJ, Lee KH, Skarp J, Kim HR, Nam KS
Journal of Vacuum Science & Technology A, 15(6), 2993, 1997