검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Optimization of the chemical mechanical polishing process for premetal dielectrics Fang SJ, Garza S, Guo HL, Smith TH, Shinn GB, Campbell JE, Hartsell RL Journal of the Electrochemical Society, 147(2), 682, 2000 |
| 2 |
On-line patterned wafer thickness control of chemical-mechanical polishing Smith TH, Fang SJ, Stefani JA, Shinn GB, Boning DS, Butler SW Journal of Vacuum Science & Technology A, 17(4), 1384, 1999 |
| 3 |
Artificial Neural-Network Exponentially Weighted Moving Average Controller for Semiconductor Processes Smith TH, Boning DS Journal of Vacuum Science & Technology A, 15(3), 1377, 1997 |