검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Elastic constants of low-k and barrier dielectric films measured by Brillouin light scattering Carlotti G, Cherault N, Casanova N, Goldberg C, Socino G Thin Solid Films, 493(1-2), 175, 2005 |
| 2 |
Measurement of the elastic and viscoelastic properties of dielectric films used in microelectronics Carlotti G, Colpani P, Piccolo D, Santucci S, Senez V, Socino G, Verdini L Thin Solid Films, 414(1), 99, 2002 |
| 3 |
Structural, morphological, and mechanical properties of plasma deposited hydrogenated amorphous carbon thin films: Ar gas dilution effects Valentini L, Kenny JM, Mariotto G, Tosi P, Carlotti G, Socino G, Lozzi L, Santucci S Journal of Vacuum Science & Technology A, 19(4), 1611, 2001 |
| 4 |
Comparative study of the elastic properties of polycrystalline aluminum nitride films on silicon by Brillouin light scattering Carlotti G, Gubbiotti G, Hickernell FS, Liaw HM, Socino G Thin Solid Films, 310(1-2), 34, 1997 |