화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Characteristics of ion beams from a Penning source for focused ion beam applications
Guharay SK, Sokolovsky E, Orloff J
Journal of Vacuum Science & Technology B, 17(6), 2779, 1999
2 Characteristics of focused beam spots using negative ion beams from a compact surface plasma source and merits for new applications
Guharay SK, Sokolovsky E, Orloff J
Journal of Vacuum Science & Technology B, 16(6), 3370, 1998