검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Crystal surface defects and oxygen gettering in thermally oxidized bonded SOI wafers Papakonstantinou P, Somasundram K, Cao X, Nevin WA Journal of the Electrochemical Society, 148(2), G36, 2001 |
| 2 |
Material effects on stress-induced defect generation in trenched silicon-on-insulator structures Nevin WA, Somasundram K, McCann P, Magee S, Paxton AT Journal of the Electrochemical Society, 148(11), G649, 2001 |
| 3 |
Density-Functional Theory Studies on Sulfur-Nitrogen Species Somasundram K, Handy NC Journal of Physical Chemistry, 100(44), 17485, 1996 |