검색결과 : 6건
| No. | Article |
|---|---|
| 1 |
Optical properties of a multibeam column with a single-electron source Kamimura O, Tanimoto S, Ohta H, Nakayama Y, Sakakibara M, Sohda Y, Muraki M, Gotoh S, Hosoda M, Someda Y, Tamamori K, Hirose F, Nagae K, Kato K, Okunuki M Journal of Vacuum Science & Technology B, 25(1), 140, 2007 |
| 2 |
Inspection of all beams in multielectron beam system Tanimoto S, Sugaya M, Furukawa A, Sohda Y, Hosoda M, Someda Y, Muraki M, Tamamori K, Hirose F, Nagae K, Kato K Journal of Vacuum Science & Technology B, 25(2), 380, 2007 |
| 3 |
Triangular-Variable-Shaped Beams Using the Cell Projection Method Someda Y, Shoda Y, Saitou N Journal of Vacuum Science & Technology B, 14(6), 3742, 1996 |
| 4 |
Modified Mask Methods for Pattern Accuracy Enhancement in Electron-Beam Lithography Sohda Y, Someda Y, Nakayama Y, Saitou N Journal of Vacuum Science & Technology B, 14(6), 3850, 1996 |
| 5 |
Coulomb Effect in Cell Projection Lithography Sohda Y, Someda Y, Saitou N, Itoh H Journal of Vacuum Science & Technology B, 13(6), 2419, 1995 |
| 6 |
Electron-Beam Cell Projection Lithography - Its Accuracy and Its Throughput Someda Y, Satoh H, Sohda Y, Nakayama Y, Saitou N, Itoh H, Sasaki M Journal of Vacuum Science & Technology B, 12(6), 3399, 1994 |