검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Study of the fundamental contributions to line edge roughness in a 193 nm, top surface imaging system Somervell MH, Fryer DS, Osborn B, Patterson K, Byers J, Willson CG Journal of Vacuum Science & Technology B, 18(5), 2551, 2000 |