검색결과 : 1건
No. | Article |
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1 |
Optical characterisation of SiOxCyHz thin films non-uniform in thickness using spectroscopic ellipsometry, spectroscopic reflectometry and spectroscopic imaging reflectometry Ohlidal I, Ohlidal M, Necas D, Franta D, Bursikova V Thin Solid Films, 519(9), 2874, 2011 |