검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Electron-beam-based photomask repair Edinger K, Becht H, Bihr J, Boegli V, Budach M, Hofmann T, Koops HWP, Kuschnerus P, Oster J, Spies P, Weyrauch B Journal of Vacuum Science & Technology B, 22(6), 2902, 2004 |
| No. | Article |
|---|---|
| 1 |
Electron-beam-based photomask repair Edinger K, Becht H, Bihr J, Boegli V, Budach M, Hofmann T, Koops HWP, Kuschnerus P, Oster J, Spies P, Weyrauch B Journal of Vacuum Science & Technology B, 22(6), 2902, 2004 |