1 |
Note on the artefacts in SRIM simulation of sputtering Shulga VI Applied Surface Science, 439, 456, 2018 |
2 |
On the target surface cleanness during magnetron sputtering Schelfhout R, Strijckmans K, Boydens F, Depla D Applied Surface Science, 355, 743, 2015 |
3 |
The influence of target surface morphology on the deposition flux during direct-current magnetron sputtering Boydens F, Leroy WP, Persoons R, Depla D Thin Solid Films, 531, 32, 2013 |
4 |
Effects of evolving surface morphology on yield during focused ion beam milling of carbon Adams DP, Mayer TM, Vasile MJ, Archuleta K Applied Surface Science, 252(6), 2432, 2006 |
5 |
Quantitative fundamental SIMS studies using O-18 implant standards Williams P, Sobers RC, Franzreb K, Lorincik J Applied Surface Science, 252(19), 6429, 2006 |
6 |
Fundamental studies of the cluster ion bombardment of water ice Szakal C, Kozole J, Winograd N Applied Surface Science, 252(19), 6526, 2006 |
7 |
Sputtering simulations of organic overlayers on metal substrates by monoatomic and clusters projectiles Postawa Z Applied Surface Science, 231-2, 22, 2004 |
8 |
Sputtering of ag under C60(+) and Ga+ projectile bombardment Sun S, Szakal C, Smiley EJ, Postawa Z, Wucher A, Garrison BJ, Winograd N Applied Surface Science, 231-2, 64, 2004 |
9 |
Impact of the Ge concentration on the Ge-ionisation probability and the matrix sputter yield for a, SiGe matrix under oxygen irradiation Huyghebaert C, Conard T, Brijs B, Vandervorst W Applied Surface Science, 231-2, 708, 2004 |
10 |
Transient sputter yields, build-up of the altered layer and Ge-segregation as a function of the O-2(+) ion-fluence in SiGe Huyghebaert C, Brijs B, Janssens T, Vandervorst W Applied Surface Science, 203, 56, 2003 |