검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
The effect of the magnetron sputtering gun size on the characteristics of the plasma and CNx film deposition Roh KM, You SJ, Kim DW, Han JH, Kim JH, Seong DJ Thin Solid Films, 519(20), 6649, 2011 |
| No. | Article |
|---|---|
| 1 |
The effect of the magnetron sputtering gun size on the characteristics of the plasma and CNx film deposition Roh KM, You SJ, Kim DW, Han JH, Kim JH, Seong DJ Thin Solid Films, 519(20), 6649, 2011 |