검색결과 : 1건
No. | Article |
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1 |
Hybrid Modeling of Deposition Profiles in Magnetron Sputtering Systems Stache J Journal of Vacuum Science & Technology A, 12(5), 2867, 1994 |
No. | Article |
---|---|
1 |
Hybrid Modeling of Deposition Profiles in Magnetron Sputtering Systems Stache J Journal of Vacuum Science & Technology A, 12(5), 2867, 1994 |