검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Space-charge effects in projection electron-beam lithography: Results from the SCALPEL proof-of-lithography system Liddle JA, Blakey MI, Bolan K, Farrow RC, Gallatin GM, Kasica R, Katsap V, Knurek CS, Li J, Mkrtchyan M, Novembre AE, Ocola L, Orphanos PA, Peabody ML, Stanton ST, Teffeau K, Waskiewicz WK, Munro E Journal of Vacuum Science & Technology B, 19(2), 476, 2001 |
| 2 |
Critical tool performance analysis for SCALPEL extensibility Stanton ST, Liddle JA, Waskiewicz WK, Mkrtchyan MM Journal of Vacuum Science & Technology B, 18(1), 112, 2000 |
| 3 |
Finite element analysis of SCALPEL wafer heating Kim BY, Engelstad RL, Lovell EG, Stanton ST, Liddle JA, Gallatin GM Journal of Vacuum Science & Technology B, 17(6), 2883, 1999 |
| 4 |
Critical dimension control at stitched subfield boundaries in a high-throughput SCALPEL((R)) system Stanton ST, Liddle JA, Waskiewicz WK, Novembre AE Journal of Vacuum Science & Technology B, 16(6), 3197, 1998 |