검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Behavior of thin Ta-based films in the Cu/barrier/Si system Stavrev M, Fischer D, Praessler F, Wenzel C, Drescher K Journal of Vacuum Science & Technology A, 17(3), 993, 1999 |
| 2 |
Crystallographic and morphological characterization of reactively sputtered Ta, Ta-N and Ta-N-O thin films Stavrev M, Fischer D, Wenzel C, Drescher K, Mattern N Thin Solid Films, 307(1-2), 79, 1997 |